JPH0189966U - - Google Patents
Info
- Publication number
- JPH0189966U JPH0189966U JP18677787U JP18677787U JPH0189966U JP H0189966 U JPH0189966 U JP H0189966U JP 18677787 U JP18677787 U JP 18677787U JP 18677787 U JP18677787 U JP 18677787U JP H0189966 U JPH0189966 U JP H0189966U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- melt
- substrate holder
- epitaxial growth
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 239000000155 melt Substances 0.000 claims description 10
- 239000007791 liquid phase Substances 0.000 claims 5
- 230000005484 gravity Effects 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677787U JPH0189966U (en]) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677787U JPH0189966U (en]) | 1987-12-07 | 1987-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189966U true JPH0189966U (en]) | 1989-06-13 |
Family
ID=31477985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18677787U Pending JPH0189966U (en]) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189966U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11330509A (ja) * | 1998-05-07 | 1999-11-30 | Honda Motor Co Ltd | Ｃｂｄ成膜装置 |
| JP2006176369A (ja) * | 2004-12-24 | 2006-07-06 | Kobe Steel Ltd | 高圧液相エピタキシャル成長装置 |
-
1987
- 1987-12-07 JP JP18677787U patent/JPH0189966U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11330509A (ja) * | 1998-05-07 | 1999-11-30 | Honda Motor Co Ltd | Ｃｂｄ成膜装置 |
| JP2006176369A (ja) * | 2004-12-24 | 2006-07-06 | Kobe Steel Ltd | 高圧液相エピタキシャル成長装置 |
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